Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1982-10-21
1985-10-01
Levy, Stewart J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 3126
Patent
active
045448876
ABSTRACT:
A method of determining the photo-induced voltage at the surface of a specimen of semiconductor material. A beam of monochromatic light of low intensity and of wavelength shorter than that corresponding to the energy gap of the semiconductor material is directed at the specimen. The light beam is modulated, and the resulting AC photovoltage signal induced at the surface of the specimen is measured. Measurements of surface photovoltage made in this way can be used to determine the surface space-charge capacitance of the specimen of semiconductor material and, therefore, to characterize the properties of the semiconductor material using conventional capacitance analysis.
REFERENCES:
patent: 4286215 (1981-08-01), Miller
patent: 4333051 (1982-06-01), Goodman
patent: 4433288 (1984-02-01), Moore
C. Munakata et al., "Non-Destructive Method of Observing Inhomogeneties in p-n Junctions . . . ", in Japanese Jour. of App. Physics, vol. 20, No. 2, Feb. 81, pp. 132-140.
T. Sukegawa et al., "Differential Photocurrent Method of Measurement . . . in a Semiconductor", in IEEE Trans. on Electron Devices, vol. ED27, No. 7, Jul. 80, pp. 1251-1255.
E. Johnson, "Large-Signal Surface Photovoltage Studies with Germanium", Physical Review, vol. III, No. 1, pp. 153-166, Jul. 1958.
A. Goodman, "A Method for the Measurements of Cadmium Sulfide", Journal Phys. Chem. Solids, vol. 23, pp. 1057-1066, 1962.
R. Williams, "Surface Photovoltage Measurements of Cadmium Sulfide", in Journal Phys. Chem. Solids, vol. 23, pp. 1057-1066, 1962.
S. Dahlberg, "Photovoltage Studies of Clean and Oxygen Covered Gallium Arsenide", Surface Science, vol. 59, pp. 83-96, 1976.
Kamieniecki, "Determination of Surface Space Charge Capacitance Using a Light Probe", in J. Vac. Sci. Tech., vol. 20, No. 3, Mar. 1982, pp. 811-814.
Physical Review, Gartner, W., "Depletion-Layer Photoeffects in Semiconductors", vol. 116, No. 1, Oct. 1959, pp. 84-87.
Baker Stephen M.
GTE Laboratories Incorporated
Keay David M.
Levy Stewart J.
LandOfFree
Method of measuring photo-induced voltage at the surface of semi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of measuring photo-induced voltage at the surface of semi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of measuring photo-induced voltage at the surface of semi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1444677