Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1991-09-30

1993-06-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, H01L 4108

Patent

active

052218708

ABSTRACT:
Surface acoustic wave devices making use of the interaction between surface acoustic wave and carriers include at least a semiconductor part, a piezoelectric layer and an intermediate insulating film. The devices of this invention include diamond or diamond-like carbon as the insulating film in contact with the piezoelectric layer. Since diamond or diamond-like carbon has the highest sound velocity, the surface acoustic wave velocity is extremely high in the piezoelectric layer in contact with diamond or diamond-like carbon. The high surface acoustic wave velocity alleviates the need of producing fine inter digital transducers. This invention is applicable to surface acoustic wave phase-shifters, surface acoustic amplifiers and surface acoustic convolvers.

REFERENCES:
patent: 4567392 (1986-01-01), Asai et al.
patent: 4611140 (1986-09-01), Whitlock et al.
patent: 4952832 (1990-08-01), Imai et al.
patent: 4967113 (1990-10-01), Mitsutsuka
patent: 5091669 (1992-02-01), Mitsutsuka

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