Silane gas sensor and a method of making the same

Details Silane gas sensor and a method of making the same Silane gas sensor and a method of making the same

1984-03-30

1986-04-15

Niebling, John F.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

73 23, 4271263, H01L 700, G01N 2704

Patent

active

045830703

ABSTRACT:
A sensor for detecting low concentrations of silane gas in air and a process for making the sensor are disclosed. The sensor comprises a silane-sensitive element and a heater to heat the element to 200.degree.-400.degree. C. The element comprises an electrode-equipped alumina porcelain tube coated with a mixture of SnO.sub.2, SbOCl, and Pt. The tube is calcined in air or in an oxidized antimony atmosphere at 600.degree.-850.degree. C. and is exposed to a silane atmosphere at 150.degree.-850.degree. C. to stabilize its properties.

REFERENCES:
patent: 4000089 (1976-12-01), Senda
patent: 4001758 (1977-01-01), Esper et al.
patent: 4033169 (1977-07-01), Fujishiro et al.
patent: 4224280 (1980-09-01), Takahama et al.
patent: 4242303 (1980-12-01), Takahashi et al.
patent: 4251225 (1981-02-01), Handa et al.
patent: 4359709 (1982-11-01), Nakatani et al.
patent: 4417228 (1983-11-01), Takami et al.

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