Metal treatment – Compositions – Heat treating
Patent
1984-04-16
1985-10-01
Roy, Upendra
Metal treatment
Compositions
Heat treating
29576B, 29576T, 148175, 148187, 357 91, 427 531, H01L 2131, H01L 21469
Patent
active
045444188
ABSTRACT:
A process for controlled surface reactions in semiconductor material which includes rapidly heating the material to a high temperature, maintaining the temperature for a short time and cooling the material all while the surface is exposed to a substance which reacts at the surface.
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