Method of making a special purity silicon nitride powder

Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound

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C01B 21068

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045826960

ABSTRACT:
This specification teaches a method of making a special purity alpha silicon nitride powder which is free from halogen-containing and metal-containing compounds as trace constituents. The method has the following steps. Tetraethyl orthosilicate (TEOS) is prepared of requisite purity. A fine mist of the TEOS solution is delivered to a heated reaction zone. Ammonia is contacted with the fine mist of TEOS in the reaction zone. A reaction product of this reaction is collected, the reaction product being amorphous silica and carbon black. The reaction product is heated to a temperature in a range of 1300.degree.-1500.degree. C. The heated reaction product is subjected to a nitrogen gas treatment to convert the silica of the reaction product into a special purity alpha silicon nitride powder because of the chemical reactions occurring between the silica, carbon black, and nitrogen. The prepared alpha silicon nitride powder is then recovered.

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patent: 4264565 (1981-04-01), Inoue
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patent: 4530825 (1985-07-01), Johansson
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patent: 4552740 (1985-11-01), Morgan
Zhang & Cannon, "Preparation of Silicon Nitride from Silica," American Ceramic Society, pp. 691-695 (1982).

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