Method of producing solid electrolyte oxygen-sensing element of

Details Method of producing solid electrolyte oxygen-sensing element of Method of producing solid electrolyte oxygen-sensing element of

1980-12-23

1982-08-24

Morgenstern, Norman

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192E, 204195S, 427 57, 427125, 4271263, 427250, 4272557, 427309, 4273763, 4273767, 427380, 4273835, 427404, 4274192, 134 1, B05D 512

Patent

active

043459854

ABSTRACT:
A method of producing an oxygen sensing element which is essentially an oxygen concentration cell in the form of a lamination of relatively thin layers. The first step of the method is to prepare a lamination of a ceramic shield layer, an inner or reference electrode layer, a solid electrolyte layer and an outer or measurement electrode layer which is formed by sintering metal particles applied to the solid electrolyte layer surface in the form of a paste or slurry and dried. Then an additional measurement electrode layer, preferably not thicker than 1.0 micron, is formed on the outer surface of the sintered measurement electrode layer by a physical vapor deposition technique such as ion plating, sputtering or vacuum evaporation. Preferably this electrode layer is formed by a two-stage vapor deposition process wherein the first stage deposition is terminated before the deposited layer becomes thicker than 0.5 microns. The addition of the vapor-deposited measurement electrode layer improves the responsiveness and durability of the oxygen sensing element.

REFERENCES:
patent: 3978006 (1976-08-01), Topp et al.
patent: 4107019 (1978-08-01), Takao et al.
patent: 4126532 (1978-11-01), Takao et al.
patent: 4253931 (1981-03-01), Gold et al.
patent: 4253934 (1981-03-01), Berg et al.
Powell et al., Vapor Deposition, p. 236, John Wiley & Sons, Inc., N.Y., .COPYRGT.1966.

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