X-ray or gamma ray systems or devices – Accessory – Alignment
Patent
1989-06-19
1990-12-18
Fields, Carolyn E.
X-ray or gamma ray systems or devices
Accessory
Alignment
378 43, 378 63, G21K 700
Patent
active
049792032
ABSTRACT:
A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target mater
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DiCicco Darrell S.
Hirschberg Joseph G.
Meixler Lewis D.
Sathre Robert
Skinner Charles H.
Fields Carolyn E.
Porte David P.
Princeton X-Ray Laser
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