Mass separator for ionized cluster beam

Details Mass separator for ionized cluster beam Mass separator for ionized cluster beam

1986-10-15

1988-04-12

Fields, Carolyn E.

Radiant energy

Ionic separation or analysis

250282, H01J 4948

Patent

active

047376376

ABSTRACT:
An apparatus for producing a beam of ionized clusters, having a cluster source and an ionizer, includes an electrostatic mass separator which permits only those clusters having a mass greater than a selected value to pass. Unclustered ions and clusters of smaller size are reflected and do not reach the substrate target. The mass separator has a retarding field electrode and an entrance electrode, both in the form of grids with the grid openings aligned. Use of a second electrostatic mass separator allows selection of a narrow range of cluster masses for acceleration against the substrate.

REFERENCES:
patent: 3679896 (1972-07-01), Wardly
patent: 3774028 (1973-11-01), Daly
patent: 4120700 (1978-10-01), Morimoto
patent: 4152478 (1979-05-01), Takagi
patent: 4554455 (1985-11-01), Todokoro et al.
patent: 4687939 (1987-08-01), Miyauchi et al.

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