Laser raster scanner having passive facet tracking

Details Laser raster scanner having passive facet tracking Laser raster scanner having passive facet tracking

1988-10-20

1990-12-18

Bovernick, Rodney B.

350 68, G02B 2610

Patent

active

049781847

ABSTRACT:
A novel laser raster scanner that scans, in response to control signals from a controller, an exposure beam across a substrate by means of a rotating polygonal mirror having a plurality of reflective facets provides passive facet tracking by means of a plurality of glass windows configured with the polygonal mirror to cooperate with corresponding ones of the reflective facets. A first beam steering mechanism provides the laser beam to a window at a first surface thereof. A second beam steering mechanism receives the laser beam from an opposed second window surface and provides an illumination beam to the corresponding reflective facet. Each window is positioned to displace the laser beam from the incident axis so as to produce a corresponding displacement of the illumination beam on the facet in the direction of mirror rotation.

REFERENCES:
patent: 4170028 (1979-10-01), DeBenedictis et al.
patent: 4205348 (1980-05-01), DeBenedictis et al.
patent: 4386272 (1983-05-01), Check et al.
patent: 4408825 (1983-10-01), Ike
patent: 4429220 (1984-01-01), Noguchi
patent: 4433849 (1985-02-01), Hanson et al.
patent: 4447723 (1984-05-01), Newmann
patent: 4538181 (1985-08-01), Taylor
patent: 4580422 (1985-04-01), Karlsson
patent: 4692629 (1987-09-01), Nakamura
patent: 4710621 (1987-12-01), Loy
patent: 4720632 (1988-01-01), Kaneko
patent: 4728789 (1988-03-01), Broockman et al.
patent: 4733064 (1988-03-01), Ishikawa
patent: 4795224 (1989-01-01), Goto

Affiliated with

Also associated with

Rating

Laser raster scanner having passive facet tracking does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser raster scanner having passive facet tracking, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser raster scanner having passive facet tracking will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1422136