Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-11-28
1985-09-10
Roy, Upendra
Metal working
Method of mechanical manufacture
Assembling or joining
148 15, 148175, 148187, 357 91, 372 46, H01L 21263, H01L 2126
Patent
active
045397430
ABSTRACT:
The property of Group III-V compound materials, whereby ion bombarded material becomes highly resistive but recovers its original low resistivity by annealing at a temperature which is dopant and material dependant, is utilized to fabricate integrated circuits which include buried semiconductor interconnections or bus bars between devices.
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Anthony Philip J.
Hartman Robert L.
Koszi Louis A.
Schwartz Bertram
AT&T Bell Laboratories
Roy Upendra
Urbano Michael J.
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