Controlling a liquid metal ion source by analog feedback and dig

Details Controlling a liquid metal ion source by analog feedback and dig Controlling a liquid metal ion source by analog feedback and dig

1991-02-19

1992-05-05

Berman, Jack I.

Radiant energy

Ion generation

Methods

250423R, H01J 3708

Patent

active

051110539

ABSTRACT:
Long term stability of a focussed ion beam from a liquid metal ion source is maintained by the combination of a conventional analog feedback technique using a beam current detection, with a superimposed digital control using a CPU which monitors current, beam current and beam extraction voltage to determine the current source state and controls the source to produce optimum operation.

REFERENCES:
patent: 4367429 (1983-01-01), Wang et al.
Shimizu et al. "A Stabilization Method of Ion Beam Current" Japan J. Appl. Phys., vol. 15 (1976), No. 1, pp. 191-192.

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