Method for fabricating high mobility thin film transistors as in

Details Method for fabricating high mobility thin film transistors as in Method for fabricating high mobility thin film transistors as in

1991-07-22

1992-05-05

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 59, 437 62, 437 86, 437974, 148DIG12, 148DIG150, H01L 2170

Patent

active

051107481

ABSTRACT:
High mobility thin film transistors for fabricating integrated drivers for active matrix displays and a special method of fabrication for obtaining the thin film transistors having mobility sufficiently high enough as drivers operable in the several megahertz frequency range needed for driving high resolution active matrix displays.

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patent: 4292730 (1981-10-01), Ports
patent: 4888304 (1989-12-01), Nakagawa et al.
patent: 4891329 (1990-01-01), Reisman et al.
patent: 4983251 (1991-01-01), Haisma et al.
patent: 5006487 (1991-04-01), Stokes
patent: 5013681 (1991-05-01), Godbey et al.

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