Piezoelectric wafer mover

Details Piezoelectric wafer mover Piezoelectric wafer mover

1978-11-06

1980-03-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 318116, H01L 4110

Patent

active

041952430

ABSTRACT:
Apparatus for effecting movement, translation and rotation, of an object relative to a reference, is disclosed, comprising transducer means having a portion thereof fixed with respect to the reference and means frictionally coupling the transducer to the object for effecting movement thereof. In addition, means for applying a predetermined potential difference waveform to the transducer to accelerate the transducer with respect to the object is disclosed. The transducer is accelerated at an acceleration which exceeds the critical acceleration of the object with respect to the transducer thereby effecting relative motion therebetween and thereby, being capable of moving the object significantly further than the extent of movement of the transducer.

REFERENCES:
patent: 3217218 (1965-11-01), Steele
patent: 3684904 (1972-08-01), Galutva et al.
patent: 3808488 (1974-04-01), Massa
patent: 3902084 (1975-08-01), May, Jr.
patent: 4019073 (1977-04-01), Vishnevsky et al.

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