Trench isolation process

Details Trench isolation process Trench isolation process

1990-10-30

1991-10-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 69, 437228, 437233, 437235, 437968, 148DIG50, 357 47, H01L 2176

Patent

active

050616536

ABSTRACT:
The disclosure relates to the article and a method of forming a field oxide which extends over an isolation trench and the adjacent substrate wherein a portion of the trench insulating sidewall at the top region thereof is removed and replaced by polysilicon. The exposed silicon on the substrate and adjacent polysilicon are than oxidized to form the field oxide which is continuous, disposed above and contacts the remaining sidewall insulator in the trench.

REFERENCES:
patent: 4104086 (1978-01-01), Bondur et al.
patent: 4292091 (1981-02-01), Togei
patent: 4509249 (1985-04-01), Goto et al.
patent: 4528047 (1985-07-01), Bayer et al.
patent: 4636281 (1987-01-01), Buiguez et al.
patent: 4661386 (1986-09-01), Goto
patent: 4853344 (1989-08-01), Darmawan
patent: 4922318 (1990-01-01), Thomas et al.

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