Method of doping a growing crystalline semiconductor film

Details Method of doping a growing crystalline semiconductor film Method of doping a growing crystalline semiconductor film

1989-12-27

1991-10-29

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 81, 437110, 437936, 437963, 437971, H01L 2120

Patent

active

050616439

ABSTRACT:
A method of growing a semiconductor thin film by MOCVD including doping with a doping gas producing a carrier concentration regulated by the decomposition speed of the doping gas, selectively irradiating the doping gas with ultraviolet light before the doping gas reaches the growing film, whereby the decomposition speed of the doping gas is increased.

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Hallais et al., "Electrical and Optical . . . MO-VPE", Journal of Electronic Materials, vol. 10, No. 4, 1981, pp. 665-682.

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