Method of heat treatment amorphous soft magnetic film layers to

Metal treatment – Process of modifying or maintaining internal physical... – Magnetic materials

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148304, 2041922, 427130, C21D 104

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active

049448056

ABSTRACT:
A method of heat treating an amorphous soft magnetic (ASM) film for use in a device that utilizes magnetism and is fabricated by depositing two or more layers of an ASM film, and an associated oxide film and conductive metal film, on a substrate. Typically, the substrate is made of an oxide. More specifically, the method involves: performing a heat treatment after each layer of the ASM film has been deposited, at a temperature lower than the crystallization temperature and the Curie point of the ASM film in a static magnetic filed applied either in a direction generally perpendicular to the direction in which a high magnetic permeability for high frequency is to be finally attained in the ASM film or in the principal direction in which the high permeability for high frequency is desired; performing a heat final treatment, after all of the layers of the ASM film have been deposited, at a temperature equal to or lower than the temperature for the previous heat treatment in a static magnetic field applied either in the principal direction or in a direction generally perpendicular thereto, the magnitude of the uniaxial magnetic anisotropy to be imparted to the ASM film being controlled by the temperature and duration of the final heat treatment.

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