Trench-filling etch-masking microfabrication technique

Details Trench-filling etch-masking microfabrication technique Trench-filling etch-masking microfabrication technique

1996-06-21

1998-06-23

Dang, Trung

Fishing, trapping, and vermin destroying

437974, 216 2, 216 79, H01L 2176

Patent

active

057704651

ABSTRACT:
A process is described for manufacturing submicron, ultra-high aspect ratio microstructures using a trench-filling etch masking technique. Deep trenches are etched into a substrate, the trenches are filled with an appropriate trench-filling material, and deep etching into the substrate is carried out with the trench-filling material serving as a mask.

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