Mask and exposure apparatus using the same

Details Mask and exposure apparatus using the same Mask and exposure apparatus using the same

1996-07-31

1998-06-23

Lesmes, George F.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430396, 378 34, 378 35, G03F 900, G21K 500

Patent

active

057703353

ABSTRACT:
A mask for use with radiation including one of X-rays and vacuum ultraviolet rays. The mask includes a transmissive member for supporting a pattern of a radiation absorptive material, and a phase shifter material provided on the transmissive member. The phase shifter material has a radiation absorptivity less than that of the radiation absorptive material. The thickness of the transmissive member at a portion where the phase shifter material is provided is less than that of another portion thereof.

REFERENCES:
patent: 4735877 (1988-04-01), Kato et al.
patent: 5394451 (1995-02-01), Miyake et al.
patent: 5418095 (1995-05-01), Vasudev et al.
patent: 5422921 (1995-06-01), Chiba
patent: 5469489 (1995-11-01), Miyake et al.
patent: 5472811 (1995-12-01), Vasudev et al.
patent: 5503950 (1996-04-01), Miyake et al.
patent: 5553110 (1996-09-01), Sentoku et al.

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