Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1994-01-03
1994-10-25
McGraw, Vincent P.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
250572, 359203, 359204, G01N 2188
Patent
active
053594070
ABSTRACT:
An optical system is arranged so that a scanning light beam for scanning a first region to be inspected and a scanning light beam for scanning a second region to be inspected are not simultaneously incident upon an object to be inspected. This prevents an adverse influence on the inspection caused by flare light generated when one scanning light beam is incident upon an edge of the object and is received by a light-receiving optical system for the region to be inspected scanned by another scanning light beam. The system includes two polygon mirrors provided as one body in an optical system at a position for projecting the light beams so that the distance between a focus point of the light beam projected on the lower surface of the object and a focus point of the light beam projected on the upper surface of the object in the beam scanning direction is greater than the width of the object in the beam scanning direction. As a result, the two light beams are alternately incident upon the object.
REFERENCES:
patent: 2844648 (1958-07-01), Rosenthal
patent: 3646568 (1972-02-01), Woywood
patent: 4460273 (1984-07-01), Koizumi et al.
patent: 4795911 (1989-01-01), Kohno et al.
patent: 4886975 (1989-12-01), Murakami et al.
Kohno Michio
Suzuki Akiyoshi
Canon Kabushiki Kaisha
McGraw Vincent P.
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