Cryopump with improved second stage array

Details Cryopump with improved second stage array Cryopump with improved second stage array

1984-05-18

1985-12-03

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62268, 55269, 417901, B01D 800

Patent

active

045559074

ABSTRACT:
A second stage cryopanel array suitable for both concentric refrigerators and side entry cryopumps is formed of two groups of semi-circular baffles mounted to respective L-shaped brackets. The array sections can be independently positioned about a second stage of a refrigerator.

REFERENCES:
patent: 3433297 (1969-03-01), Kohler
patent: 4121430 (1978-10-01), Bachler et al.
patent: 4150549 (1979-04-01), Lonesworth
patent: 4295338 (1981-10-01), Welch
patent: 4336690 (1982-06-01), Welch
patent: 4466252 (1984-08-01), Hood

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