Semiconductor wafer contact system and method for contacting a s

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324755, G01R 106

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active

056296304

ABSTRACT:
A semiconductor wafer contact system includes a base substrate (13) which has an array of raised supports (18). The array of raised supports (18) are distributed in a pattern corresponding to the pattern of electrical contacts (12) on the semiconductor wafer (10), to be contacted. In between the base substrate (13) and the wafer to be contacted (10) is a flexible circuit layer (14) including an array of electrical contacts (15) having the same pattern as the contacts (12) of the wafer and the raised supports (18). The raised supports (18) provide focused and localized force, pressing the membrane test contacts (15) against the wafer electrical contacts (12).

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Dennis J. Genin et al., "Probing Considerations in C-4 Testing of IC Wafers," ICMCM Proceedings 1992, pp. 124-128.
Packard Hughes Interconnect Product Brochure, 1993.

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