Techniques for forming superconductive lines

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437935, 437220, 148DIG90, 148DIG93, 505703, 505706, 505330, 427 62, H01L 2144

Patent

active

055939180

ABSTRACT:
Various techniques for forming superconductive lines are described whereby superconductive lines can be formed by stamping, etching, polishing, or by rendering selected areas of a superconductive film (layer) non-superconductive. The superconductive material can be "perfected" (or optimized) after it is formed into lines (traces). In one embodiment, trenches are etched in a substrate, the trenches are filled with superconductive material, and any excess superconductive material overfilling the trenches is removed, such as by polishing. In another embodiment, superconductive lines are formed by rendering selected areas of a superconductive layer (i.e., areas other than the desired superconductive lines) non-superconductive by "damaging" the superconductive material by laser beam heating, or by ion implantation. Superconductive lines formed according to the invention can be used to protect semiconductor devices (e.g., transistor structures) from over-current or overheating conditions such as those caused by CMOS latch-up. Current density limits and/or thermal limits of superconductors are employed to cause a superconductive trace to become non-superconductive when these limits are exceeded.

REFERENCES:
patent: 4093503 (1978-06-01), Harris et al.
patent: 4316785 (1982-02-01), Suzuki et al.
patent: 4604298 (1986-08-01), Shevtchuk et al.
patent: 4690833 (1987-09-01), Donson et al.
patent: 4775439 (1988-10-01), Seeger, Jr. et al.
patent: 4900709 (1990-02-01), Heijman et al.
patent: 4963523 (1990-10-01), Ekin et al.
patent: 4999336 (1991-03-01), Nadkarni et al.
patent: 5014420 (1991-05-01), Howard et al.
patent: 5015620 (1991-05-01), Ekin et al.
patent: 5051396 (1991-09-01), Yamazaki
patent: 5057877 (1991-10-01), Briley et al.
patent: 5075282 (1991-12-01), Koinuma et al.
patent: 5087607 (1992-02-01), Strom et al.
patent: 5089465 (1992-02-01), Sibata et al.
patent: 5096882 (1992-03-01), Kato et al.
patent: 5135908 (1992-08-01), Yang et al.
patent: 5140001 (1992-08-01), Allen et al.
patent: 5141777 (1992-08-01), Frentzel et al.
patent: 5264375 (1993-11-01), Bang et al.
patent: 5270294 (1993-12-01), Wu et al.
patent: 5326988 (1994-07-01), Ishida
"Direct Laser and Electron Beam Writing on Superconducting Materials" (Anonymous) Research Disclosure #29485 Oct. 1988 p. 815.
"Laser Chemical Technique For Rapid Direct Writing Of Surface Relief In Silicon", by Ehrlich et al., Appl. Phys. Lett., vol. 38, No. 12, pp. 1018-1020, Jun. 1981.
"Rapid Direct Writing Of High-Aspect-Ratio Trenches In Silicon", by Treyz et al., Microelectronics Sciences Laboratories, Dec. 1986.
"Superconductivity at 93 K in a New Mixed-Phase Y--Ba--Cu--O Compound System at Ambient Pressure", by Ashburn et al., Physical Review Letters, vol. 58, No. 9, Mar. 1987, pp. 908-910.
"Quantum Interference Devices Made From Superconducting Oxide Thin Films", by Koch et al., Appl. Phys. Lett., vol. 51, No. 3, Jul. 1987, pp. 200-202.
"Critical-Current Measurements in Epitaxial Films of YBa2Cu3O7-x Compound", by Chaudhari et al., Physical Review Letters, vol. 58, No. 25, Jun. 1987, pp., 2684-2686.
"Water Interaction With The Superconducting YBa2Cu3O7 Phase", by Yan et al., Appl. Phys. Lett., vol. 51, No. 7, Aug. 1987, pp. 532-534.
"Chemical Etching of High-Tc Superconducting Y--Ba--Cu--O Films in Phosphoric Acid Solution", by Yoshizako et al., Japanese Journal of Applied Physics, vol. 26, No. 9, Sep. 1987, pp. L1533-L1534.
"Preparation and Substrate Reactions of Superconducting Y--Ba--Cu--O Films", by Gurvitch et al., Appl. Phys. Lett., vol. 51, No. 13, Sep. 1987, pp. 1027-1029.
"Pulsed Laser Etching of High Tc Superconducting Films", by Inam et al., Appl. Phys. Lett., vol. 51, No. 14, Oct. 1987, pp. 1112-1114.
"Reproducible Technique for Fabrication of Thin Films of High Transition Temperature Superconductors", by Mankiewich et al., Appl. Phys. Lett., vol. 5, No. 21, Nov. 1987, pp. 1753-1755.
"Magnetron Sputtering and Laser Patterning of High Transition Temperature Cu Oxide Films", by Scheuermann et al., Appl. Phys. Lett., vol. 51, No. 23, Dec. 1987, pp. 1951-1953.
"Thin-film YBaCuO Superconductors formed by Cu/BaO/Y2O3 Layer Structures", by Chang et al., Appl. Phys. Lett., vol. 52, No. 1, Jan. 1988, pp. 72-74.
"Reactive Ion Bean Etching of Y--Ba--Cu--O Superconductors", by Takado et al., Appl. Phys. Lett., vol. 51, No. 1, Jan. 1988, pp. 69-71.
"Direct Laser Writing of Superconducting Patterns of Y1Ba2Cu3O7-8", by Gupta et al., Appl. Phys. Lett., vol. 52, No. 8, Feb. 1988, pp. 665-666.
"Micropatterning of High Tc Films With An Excimer Laser", by Mannhart et al., Appl. Phys. Lett., vol. 52, No. 15, Apr. 1988, pp. 1271-1273.
"Chemical Etching of Y--Cu--Ba--O Thin Films", by Shih et al., Appl. Phys. Lett., vol. 52, No. 18, May 1988, pp. 1523-1524.
"Use of Ion Beams to Decompose Metalorganics Into Patterned Thin-Film Superconductors", by Mantese et al., Appl. Phys. Lett., vol. 52, No. 20, May 1988, pp. 1741-1742.
"Laser Patterning of Metal Oxide Superconductor Films by Reactive Solid-State Transformation", by Rothschild et al., IEEE electron Device Letters, vol. 9, No. 2, Feb. 1988, pp. 68-70.
"Use of Electron Beam Lithography to Selectively Decompose Metalorganics Into Patterned Thin-Film Superconductors", by Mantese et al., Electrical and Electronics Engineering Dept., Jun. 1988. Appl. Phys. Lett. vol. 53, No. 6 p. 526.
"Ion Beam Patterning of Spin-On Metalorganic Precursors and Formation of High Tc Superconductors", by Gross et al., Appl. Phys. Lett., vol. 53, No. 9, Aug. 1988, pp. 802-804.
"High Transition Temperature Superconducting Thin Films: In-Situ Growth, Processing and Properties", by Lathrop et al., IEEE, Aug. 1988, pp. 278-281.
"YBaCuO Superconducting Films on SiO2 Substrates Formed From Cu/BaO/Y2O3/Ag Layer Structures", by Chang et al., Appl. Phys. Lett., vol. 53, No. 10, Sep. 1988, pp. 916-918.
"Growth, Patterning, and Weak-Link Fabrication of Superconducting YBa2Cu3O7-x Thin Films", by Hilton et al., Appl. Phys. Lett., vol. 53, No. 12, Sep. 1988, pp. 1107-1109.
"Selective Laser Pyrolysis of Metalorganics as a Method of Forming Patterned Thin-Film Superconductors", by Mantese et al., Appl. Phys. Lett., vol. 52, No. 15, Oct. 1988, pp. 1335-1337.
"High Tc Superconducting Thin Films by Rapid Thermal Annealing of Cu/BaO/Y2O3 Layered Structures", by Licata et al., Appl. Phys. Lett., vol. 53, No. 22, Nov. 1988, pp. 2229-2231.
"Interface Formation: High-Temperature Superconductors With Noble Metals, Reactive Transition Metals, and Semiconductors", by Meyer III et al., American Institute of Physics, 1988, pp. 358-367.
"Prospects For Applications of High-Temperature Superconductors", by Van Duzer, 2nd Workshop on High Temperature Superconducting Electron Devices, Jun. 1989.
"Interdiffusion Between S1 Substrates and YBaCuO Films", by Ma et al., International M2S-HTSC Conference, Jul. 1989. (to be published).
"Novel Method of Patterning YBaCuO Superconducting Thin Films", by Ma et al., Appl. Phys. Lett., vol. 55, No. 9, Aug. 1989, pp. 896-898.
"Superconductivity Moves From The Land Of Theory Into The Land Of Reality", by Ormond, EDN, Oct. 1992, pp. 49, 51, 52, 56 & 58.
"Rapid Thermal Annealing of YBaCuO Thin Films Deposited on SiO2 Substrates", by Ma et al., Int. M2S-HTSC Conf. Stanford, CA (Jul. 23-28, 1989) (to be published).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Techniques for forming superconductive lines does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Techniques for forming superconductive lines, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Techniques for forming superconductive lines will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1387856

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.