Method for manufacturing an infrared sensor array

Details Method for manufacturing an infrared sensor array Method for manufacturing an infrared sensor array

1996-02-13

1998-03-10

Trinh, Michael

Fishing, trapping, and vermin destroying

437 4, 437228SEN, 437901, H01L 2177

Patent

active

057260664

ABSTRACT:
An infrared sensor array and manufacturing method thereof is disclosed including a substrate; a supporter having a space portion for adiabatic structure between the substrate and supporter; and a plurality of infrared sensors arranged with a predetermined distance each other on the supporter above the space portion.

REFERENCES:
patent: 4692994 (1987-09-01), Moniwa et al.
patent: 5068203 (1991-11-01), Logsdon et al.
patent: 5095401 (1992-03-01), Zavracky et al.
patent: 5164339 (1992-11-01), Gimpelson
patent: 5165289 (1992-11-01), Tilmans
patent: 5426412 (1995-06-01), Tomonari et al.

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