Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1992-07-17
1994-10-25
Nguyen, Vinh
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
165 803, G01R 1512, F25B 2900
Patent
active
053592859
ABSTRACT:
A burn-in apparatus for use in burn-in tests includes a burn-in test container for accommodating a plurality of semiconductor device. Also, the burn-in apparatus includes a measuring device for individually measuring junction temperatures of semiconductor chips of the respective semiconductor device by detecting electric characteristics of temperature sensors built in the semiconductor chips, and a temperature adjusting device for controlling amounts of heat radiation and conduction of the semiconductor chips. The temperature adjusting device, such as device for controlling air flow rates of air nozzles of the container, is controlled by control device on the basis of outputs of the measuring device. Thus, the junction temperatures can be kept within a predetermined temperature range to thereby improve the accuracy of screening tests.
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Hashinaga Tatsuya
Nishiguchi Masanori
Nguyen Vinh
Sumitomo Electric Industries Ltd.
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