Piezoelectric crystalline film of zinc oxide containing additive

Details Piezoelectric crystalline film of zinc oxide containing additive Piezoelectric crystalline film of zinc oxide containing additive

1978-07-24

1979-08-14

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

252 692, 427100, H01L 4118

Patent

active

041646762

ABSTRACT:
Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, the crystalline zinc oxide film containing as additive elements, vanadium, manganese and at least one element selected from the group consisting of chromium, iron, cobalt and nickel. The piezoelectric crystalline films are homogeneous and have high resistivity and a smooth surface so that they can be used as a transducer with good conversion efficiency in a wide range of low to high frequencies.

REFERENCES:
patent: 3091707 (1963-05-01), Hutson
patent: 3409464 (1968-11-01), Shiozawa
patent: 3440550 (1969-04-01), Moore
patent: 3471721 (1969-10-01), Moore

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