Fishing – trapping – and vermin destroying
Patent
1986-04-29
1987-09-15
Ozaki, George T.
Fishing, trapping, and vermin destroying
148DIG150, 148DIG164, 437 83, 437 97, H01L 21425
Patent
active
046929940
ABSTRACT:
A process for manufacturing semiconductor devices, comprising steps for obtaining a multilayered structure consisting of semiconductors and insulating films, by forming a microbridge which consists of a semiconductor in the form of a connecting bar or a one-side supported bar, and by forming an insulating film by oxidizing the exposed surface of the microbridge. The semiconductor device manufactured by the process of the invention exhibits good interface properties between the insulating film and the semiconductor layer. The invention makes it possible to easily manufacture a variety of MOSFETs with the SOI structure, which exhibit excellent characteristics.
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Moniwa Masahiro
Sunami Hideo
Warabisako Terunori
Hitachi , Ltd.
Ozaki George T.
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