Process for manufacturing semiconductor devices containing micro

Fishing – trapping – and vermin destroying

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148DIG150, 148DIG164, 437 83, 437 97, H01L 21425

Patent

active

046929940

ABSTRACT:
A process for manufacturing semiconductor devices, comprising steps for obtaining a multilayered structure consisting of semiconductors and insulating films, by forming a microbridge which consists of a semiconductor in the form of a connecting bar or a one-side supported bar, and by forming an insulating film by oxidizing the exposed surface of the microbridge. The semiconductor device manufactured by the process of the invention exhibits good interface properties between the insulating film and the semiconductor layer. The invention makes it possible to easily manufacture a variety of MOSFETs with the SOI structure, which exhibit excellent characteristics.

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patent: 4555843 (1985-12-01), Malhi
patent: 4603468 (1986-08-01), Lam
patent: 4649627 (1987-03-01), Abernathy et al.

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