Stock material or miscellaneous articles – Composite – Of metal
Patent
1996-12-03
1999-06-29
Speer, Timothy M.
Stock material or miscellaneous articles
Composite
Of metal
428450, 428472, 428698, 428701, 428702, B32B 1700
Patent
active
059166908
ABSTRACT:
A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.
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Micro)n Technology, Inc.
Speer Timothy M.
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