Method for manufacturing semiconductor elements from amorphous s

Details Method for manufacturing semiconductor elements from amorphous s Method for manufacturing semiconductor elements from amorphous s

1980-10-10

1983-01-18

Page, Thurman K.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118623, 136258, 204181N, 204DIG5, 427 47, 427 87, 427 93, B05D 306

Patent

active

043692052

ABSTRACT:
A method and device for manufacturing semiconductor elements of amorphous licon which convert light into electrical energy comprising, supplying a silicon compound to a vessel, passing an electric field through the vessel sufficient to produce a glow discharge having free electrons in the vessel to precipitate amorphous silicon from the silicon compound onto a substrate in the vessel, and providing a magnetic field in the vessel which is directed substantially transversely to the electric field and is of a magnitude sufficient to conduct the free electrons along closed paths over the surface of the substrate.

REFERENCES:
patent: 3485666 (1969-12-01), Sterling et al.
patent: 4022947 (1977-05-01), Grubb et al.
patent: 4196438 (1980-04-01), Carlson

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