Method for electrically detecting positional deviation of contac

Details Method for electrically detecting positional deviation of contac Method for electrically detecting positional deviation of contac

1990-02-27

1991-11-19

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324537, G01R 3100

Patent

active

050669087

ABSTRACT:
A method for detecting a positional deviation of a contact hole formed in an interlayer insulator layer includes the steps of forming a detection conductor pattern on a substrate at a peripheral portion of a contact hole formation area in which a contact hole is to be formed, and forming a first insulating layer to cover the detection conductor pattern. Then, a first conducting layer of a predetermined pattern is formed on the first insulating layer to cover the contact hole formation area, and a second insulating layer is formed to cover the first conducting layer. Furthermore, a contact hole is formed at the contact hole formation area in the second insulating layer, and a second conducting layer is deposited on the second insulation layer so that the second conducting layer is deposited within the contact hole. Thereafter, a short-circuit between the detection conductor pattern and one of the first and second conducting layers is detected. When the short-circuit is detected, it is judged that the formed contact hole adversely deviates from a proper position where the contact hole is to be formed.

REFERENCES:
patent: 3301939 (1967-01-01), Krasnow
patent: 3859711 (1975-01-01), McKiddy
patent: 4510446 (1985-04-01), Braun et al.
patent: 4894606 (1990-01-01), Paur

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