Semiconductor device manufacturing: process – With measuring or testing
Patent
1996-01-29
1999-04-06
Tsai, Jey
Semiconductor device manufacturing: process
With measuring or testing
438 10, 438255, 438398, 324658, H01L 2166, G01R 3126
Patent
active
058917446
ABSTRACT:
A method of monitoring a process of manufacturing a semiconductor wafer including an area of hemispherical grain polysilicon, the method comprising providing a probe including a liquid conductor; and performing a capacitance-voltage measurement with the probe, using a quasi-static measurement method, to determine capacitance-voltage characteristics at the area of hemispherical grain polysilicon.
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Lowrey Tyler A.
Schuegraf Klaus F.
Thakur Randhir P. S.
Micro)n Technology, Inc.
Tsai Jey
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