Coating solution for forming glassy layers

Details Coating solution for forming glassy layers Coating solution for forming glassy layers

1994-03-18

1995-12-05

Brunsman, David

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

501 12, 525477, 528 34, 528 38, 528 43, C09D18304, C09D18306, C09D18307, C09D18308

Patent

active

054724880

ABSTRACT:
There is disclosed doped spin-on glass compositions such as boronoxide doped spin-on glass compositions with a high carbon content and silane adhesion promoter incorporated therein for use as coating layers on substrates such as silicon wafers.

REFERENCES:
patent: 3258477 (1966-06-01), Plueddemann et al.
patent: 3402191 (1968-09-01), Morehouse
patent: 3544498 (1970-12-01), Holdstock et al.
patent: 3615943 (1971-10-01), Genser
patent: 3789023 (1974-01-01), Ritchie
patent: 3832202 (1974-08-01), Ritchie
patent: 3837873 (1974-09-01), Pollack et al.
patent: 3892608 (1975-07-01), Kuhn
patent: 3905823 (1975-09-01), Piskoti
patent: 3915766 (1975-10-01), Pollack et al.
patent: 3928225 (1975-12-01), Schafer
patent: 3969168 (1976-07-01), Kuhn
patent: 3975294 (1976-08-01), Dumoulin
patent: 3986997 (1976-10-01), Clark
patent: 4152286 (1979-05-01), Crosson et al.
patent: 4173490 (1979-11-01), Rotenberg et al.
patent: 4338375 (1982-07-01), Hashimoto et al.
patent: 4439239 (1984-03-01), Greigger et al.
patent: 4447498 (1984-05-01), Fink et al.
patent: 4493886 (1985-01-01), Lauks
patent: 4509981 (1985-04-01), Sanders, Jr. et al.
patent: 4557797 (1985-12-01), Fuller et al.
patent: 4563241 (1986-01-01), Tanaka et al.
patent: 4571366 (1986-02-01), Thomas et al.
patent: 4587138 (1986-05-01), Yau et al.
patent: 4605450 (1986-08-01), Thomas et al.
patent: 4619719 (1986-10-01), Thomas et al.
patent: 4620986 (1986-11-01), Yau et al.
patent: 4621042 (1986-11-01), Pampalone et al.
patent: 4652618 (1987-03-01), Sumida et al.
patent: 4798629 (1989-01-01), Wood et al.
patent: 4808653 (1989-02-01), Haluska et al.
patent: 4835089 (1989-05-01), Iwayanagi et al.
patent: 4842901 (1989-06-01), Merrem et al.
patent: 4847120 (1989-07-01), Gent
patent: 4865649 (1989-09-01), Kashiwagi et al.
patent: 4885262 (1989-12-01), Ting et al.
patent: 4898907 (1990-02-01), Haluska et al.
patent: 4935095 (1990-06-01), Lehrer
patent: 5037777 (1991-08-01), Mele et al.
patent: 5100503 (1992-03-01), Allman et al.
patent: 5152834 (1992-10-01), Allman
patent: 5186745 (1983-02-01), Maniar
Morimoto et al., "Manufacturable and Reliable Spin-on-Glass Planarization . . . Layer Technology", 5th Int'l. VLSI Multilevel Interconnect Conference Santa Clara, Calif. (Jun. 13-15, 1988), pp. 411-415.

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