High curvature diamond field emitter tip fabrication method

Details High curvature diamond field emitter tip fabrication method High curvature diamond field emitter tip fabrication method

1997-01-31

1999-06-29

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 50, 313311, H01J 902, H01J 130

Patent

active

059160055

ABSTRACT:
A high curvature diamond field emitter tip fabrication method includes forming on a substrate a diamond film composed of square (100) phase-oriented facets and (111) phase-oriented facets distributed thereabout and columnar diamond particles having defect density differences between the diamond formed beneath the (100) and (111) diamond growth facets, and etching the diamond film using a oxygen-containing gas plasma. Further, the method includes forming on a substrate a diamond film composed of square (100) facets and (111) facets distributed thereabout and columnar diamond particles having defect density differences between the diamond formed beneath the (100) and (111) diamond growth facets, forming a supporting film on the diamond film, removing the substrate therefrom, and etching the diamond film using an oxygen-containing gas plasma after any one of the previously described steps.

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