Method of fabricating composite piezo-electric members and a mas

Details Method of fabricating composite piezo-electric members and a mas Method of fabricating composite piezo-electric members and a mas

1997-06-02

1999-04-06

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

29 2535, G03F 900

Patent

active

058915958

ABSTRACT:
Composite piezo-electric members having an intended structure are fabricated based on the LIGA process which includes the exposure of synchrotron radiation X-rays, development and lithography. With the intention of reducing the cost of the X-ray exposure mask, it is made of wire gauze having a regular pattern and formed by electrocasting.

REFERENCES:
patent: 4683396 (1987-07-01), Takeuch et al.
patent: 5016333 (1991-05-01), Payne et al.
patent: 5164920 (1992-11-01), Bast et al.
patent: 5366613 (1994-11-01), Suda et al.
"Piezoelectric composites for micro-ultrasonic transducers realize with deep Etch X-ray lithography" Hirata et al, Pro.IEEE Micro-Electromechanical Systems, 1995, pp. 191-195.
"The Liga Process for fabrication of three-dimensional Microscale structures" P.Bley, Interdisciplinary Science REviews, 1933, vol. 18, No. 3, pp. 267-271.

Affiliated with

Also associated with

Rating

Method of fabricating composite piezo-electric members and a mas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating composite piezo-electric members and a mas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating composite piezo-electric members and a mas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1369678