Spectrometer objective for electron beam mensuration techniques

Details Spectrometer objective for electron beam mensuration techniques Spectrometer objective for electron beam mensuration techniques

1986-06-16

1989-02-28

Fields, Carolyn E.

Radiant energy

Electron energy analysis

250310, 250396ML, 250397, H01J 3705

Patent

active

048088218

ABSTRACT:
A spectrometer objective is composed of a short focal length, asymmetrical objective lens comprising an integrated electrostatic opposing field spectrometer and a single-stage deflection system arranged within the magnetic lens. Since the deflection of primary electrons occurs within the spectrometer objective, the space for a two-state deflection system employed in conventional systems between a condenser lens and an objective lens can be eliminated. The extremely-short structural length of the electron beam measuring apparatus which is thereby obtainable, in turn, has a beneficial effect on the influence of the lateral Boersch effect on probe diameter, this influence increasing with the length of the electron-optical beam path.

REFERENCES:
patent: 3930181 (1975-12-01), Pfeiffer
patent: 4464571 (1984-08-01), Plies
Kawamoto, H., "Electron Beam Tester with in the Lens Analyzer", Proceedings of the Symposium on Electron Beam Testing, Nov. 9-10, 1984, Osaka, Japan.

Affiliated with

Also associated with

Rating

Spectrometer objective for electron beam mensuration techniques does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spectrometer objective for electron beam mensuration techniques, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spectrometer objective for electron beam mensuration techniques will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1369106