Fishing – trapping – and vermin destroying
Patent
1995-02-17
1995-12-26
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 52, 437919, 148DIG14, H01L 21443, H01L 218242
Patent
active
054787726
ABSTRACT:
The invention is a storage cell capacitor having a storage node electrode comprising a barrier layer interposed between a conductive plug and an oxidation resistant layer. A thick insulative layer protects the sidewalls of the barrier layer during the deposition and anneal of a dielectric layer having a high dielectric constant. The method comprises forming the conductive plug in a thick layer of insulative material such as oxide or oxide
itride. The conductive plug is recessed from a planarized top surface of the thick insulative layer. The barrier layer is formed in the recess. The process is then continued with a formation of an oxidation resistant conductive layer and the patterning thereof to complete the formation of the storage node electrode. Next a dielectric layer having a high dielectric constant is formed to overly the storage node electrode and a cell plate electrode is fabricated to overly the dielectric layer.
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Booth Richard A.
Chaudhuri Olik
Collier Susan B.
Micro)n Technology, Inc.
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