Method of producing isolation groove structure

Details Method of producing isolation groove structure Method of producing isolation groove structure

1988-07-08

1989-02-28

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 68, 357 55, H01L 2906, H01L 21461

Patent

active

048085502

ABSTRACT:
An isolation groove structure comprises a deep isolation groove having a cross section with substantially straight and parallel side wall portions and a generally V-shaped bottom portion, and a shallow isolation groove having a generally V-shaped cross section. The V-shaped bottom portion of the deep isolation groove and the shallow isolation groove being formed simultaneously by anisotropic etching.

REFERENCES:
patent: 4269636 (1981-05-01), Rivoli et al.
patent: 4397075 (1983-08-01), Fatula et al.
patent: 4420874 (1983-12-01), Tunatsu
patent: 4661832 (1987-04-01), Lechaton et al.

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