Semiconductor accelerometer

Details Semiconductor accelerometer Semiconductor accelerometer

1992-10-21

1995-12-05

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1508

Patent

active

054718767

ABSTRACT:
A structure of a semiconductor accelerometer which includes a body having a mass, beams for supporting the mass and gauge resistors provided on the beams, upper and bottom covering members sandwiching the body so as to form apertures over and under the mass and at least one through hole provided in at least any one of said upper and bottom covering members. Preferably, the through hole is provided at a center portion of the upper covering member. A probe passes through the through hole and the mass is pressed down with the top of the probe by which a predetermined strain is caused at the beams having the gauge resistors. This permits a measurement of the characteristic of the output voltage to the variation of the mass in the vertical direction.

REFERENCES:
Henry V. Allen et al., "Understanding Silicon Accelerometers". This paper is an expanded version of an article by the same authors which appeared in Sensors, Sep. 1989, pp. 17-31.
"A Batch-Fabricated Silicon Accelerometer", by L. M. Roylance, et al., IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.

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