Piezoelectric/electrostrictive actuator having integral ceramic

Details Piezoelectric/electrostrictive actuator having integral ceramic Piezoelectric/electrostrictive actuator having integral ceramic

1995-03-23

1995-12-12

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, H01L 4108

Patent

active

054752795

ABSTRACT:
A piezoelectric/electrostrictive actuator including a ceramic base member having a pressure chamber or chambers, and a piezoelectric/electrostrictive element or elements is disclosed. The base member includes a spacer plate having at least one window which provides the pressure chamber(s), and which is closed by a closure plate and a connecting plate disposed on the opposite surfaces of the spacer plate. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral ceramic structure as the ceramic base member. Each piezoelectric/electrostrictive element is disposed on a wall partially defining the corresponding pressure chamber, for deforming the wall so as to change a pressure of the corresponding chamber. The element has a piezoelectric/electrostrictive unit consisting of a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate of the base member.

REFERENCES:
patent: 3747120 (1973-07-01), Stemme
patent: 3946398 (1976-03-01), Kyser et al.
patent: 4680595 (1987-07-01), Cruz-Uribe et al.
patent: 4695854 (1987-09-01), Cruz-Uribe
patent: 4937597 (1990-06-01), Yasuhara
patent: 5089455 (1992-02-01), Ketcham et al.
patent: 5144342 (1992-09-01), Kubota
Patent Abstracts of Japan, vol. 8, No. 201 (M-325) Sep. 14, 1984 & JP-A-49 089 163 (EPSON KK) May 23, 1987.

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