Encoder with high resolving power and accuracy

Details Encoder with high resolving power and accuracy Encoder with high resolving power and accuracy

1990-05-11

1992-09-08

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, 356356, G01D 534, H01J 314

Patent

active

051460858

ABSTRACT:
A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.

REFERENCES:
patent: 4629886 (1986-12-01), Akiyama et al.
patent: 4676645 (1987-06-01), Taniguchi et al.
patent: 4794251 (1988-12-01), Scholsan
patent: 4829342 (1989-05-01), Nishimura
patent: 4868385 (1989-09-01), Nishimura
patent: 4930895 (1990-06-01), Nishimura et al.
patent: 4967072 (1990-10-01), Nishimura
patent: 4970388 (1990-11-01), Nishimura et al.
patent: 4975570 (1990-12-01), Nishimura et al.
patent: 5011287 (1991-04-01), Mino
Patent Abstracts of Japan, vol. 10, No. 229, Aug. 8, 1986, JP-A-61 65 115, Apr. 3, 1986.

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