Waveform displaying method and waveform analyzing apparatus

Details Waveform displaying method and waveform analyzing apparatus Waveform displaying method and waveform analyzing apparatus

1993-01-19

1996-02-20

Nguyen, Vinh P.

Electricity: measuring and testing

Plural, automatically sequential tests

324121R, G01R 3126

Patent

active

054932084

ABSTRACT:
Temperature-dependent waveforms, variable with time, of the output characteristics such as current, capacitance, threshold voltage, and the like of a semiconductor device are measured and analyzed in a short period of time for accurately and quickly identifying deep levels in the semiconductor device. When a step voltage is applied to a terminal of the semiconductor device, the output characteristics thereof respond with a waveform I. After the elapse of a time t from the application of the step voltage, the value of t.multidot.(dI/dt) is measured and stored at a plurality of temperatures T. The recorded values are three-dimensionally displayed in a space coordinate system having an x-axis representing 1/T, a y-axis representing log(tT.sup.2), and a z-axis representing t.multidot.(dI/dt).

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D. V. Lang, "Deep-level transient spectroscopy: A new method to . . . semiconductors", Journal of Applied Physics, vol. 45, No. 7, Jul. 1974, pp. 3023-3032.

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