Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1994-08-17
1995-12-12
Niebling, John
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
204252, 437104, C25B 100
Patent
active
054746590
ABSTRACT:
Many devices, such as those based on III-V semiconductor materials, are produced utilizing gases such as arsine that require careful handling of compressed gas cylinders. This care has engendered a search for alternate approaches. It has been found that the use of electrochemically generated gases such as arsine yields an efficient, pure source of such gases without necessitating the storage of large gas quantities. Thus, a device fabrication procedure including in situ electrochemical generation of gases such as arsine is particularly useful.
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Cadet Gardy
Mitchell James W.
Valdes Jorge L.
AT&T Corp.
Mee Brendan
Niebling John
Schneider Bruce S.
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