Fishing – trapping – and vermin destroying
Patent
1994-12-27
1996-02-20
Fourson, George
Fishing, trapping, and vermin destroying
437245, 437919, 437192, 1566461, 216 6, 216 75, H01L 213065
Patent
active
054928559
ABSTRACT:
A method of manufacturing a semiconductor device, where on top of a substrate having already-completed circuit elements and wiring, etc., an insulation underlayer a, Pt layer for a bottom electrode, a dielectric film and a Pt layer for a top electrode are shaped. A top electrode, capacitance insulation film and bottom electrode are formed by etching the Pt layer for the top electrode or the Pt layer for the bottom electrode using an etching gas contained a S component while composing a Pt and S compound. Alternatively the Pt and S compound can be composed first, and then the compound can be etched.
REFERENCES:
patent: 5227337 (1993-07-01), Kadomura
patent: 5381302 (1995-01-01), Sandhu et al.
patent: 5424238 (1995-06-01), Sameshima
Van Glabbeek et al., "Reactive Ion Etching of Pt/PbZrTiO.sub.3 /Pt Integrated Ferroelectric Capacitors", Materials Research Society Symposium Proceedings, (1993), vol. 310, pp. 127-132.
Extended Abstracts, Autumn Meeting 1991, The Japan Society of Applied Physics, 9p-ZF-17, p. 517.
Extended Abstracts, Spring Meeting 1993, The Japan Society of Applied Physics, 30a-ZE-3, p. 577.
Matsumoto Shoji
Nakagawa Satoshi
Nikou Hideo
Bilodeau Thomas G.
Fourson George
Matsushita Electronics Corporation
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