Method of manufacturing increased conductivity base contact/feed

Details Method of manufacturing increased conductivity base contact/feed Method of manufacturing increased conductivity base contact/feed

Filed on

1993-01-29

Date issued

1996-02-20

Examiner

Fourson, George

Patent Class

Fishing, trapping, and vermin destroying

Other Related Categories

437 32, 437 27, 148DIG10, 148DIG11, H01L 21265

Type

Patent

Status

active

Patent number

054928443

Description

ABSTRACT:
A very deep P.sup.+ diffusion step is performed prior to the definition of a self-aligning emitter/P.sup.+ region. Furthermore, the initial P.sup.+ region is formed with dimensions sufficiently narrow to allow the subsequent emitter/P.sup.+ formation step to overlap the deeper P.sup.+ step by enough distance for the P.sup.+ step to completely cover the deep P.sup.+ region with its significant lateral diffusion. In this manner, a low sheet resistance in combination with proper alignment of the P.sup.+ heavy region with the emitter region is obtained.

REFERENCES:
patent: 3725150 (1973-04-01), George
patent: 5100812 (1992-03-01), Yamada et al.

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