Optical position sensor with corner-cube and servo-feedback for

Details Optical position sensor with corner-cube and servo-feedback for Optical position sensor with corner-cube and servo-feedback for

1992-05-13

1993-03-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2502011, 250306, 250234, G01J 120, G01N 2300

Patent

active

051967138

ABSTRACT:
A scanning probe microscope includes a probe support carrying a scanning probe, a piezoelectric transducer having a free end connected to a stage on which the sample is supported, probe sensing circuitry connected to sense a signal indicating interaction between the tip of the probe and a point of the sample surface and producing in response thereto a Z control voltage so as to optimize the interaction and produce a Z coordinate representing the height of a presently scanned point of the sample surface. Optical sensing circuitry includes a light source connected in fixed relation to the sample stage, a position sensitive photodetector, and optics focusing lens for focusing a portion of the light onto a position sensitive detector to cause it to produce X and Y position signals. The light source includes a retroreflector attached to the piezoelectric transducer receiving a beam from a stationary laser and focused by a stationary lens onto the position sensitive detector. Feedback servo circuits are responsive to the X and Y position signals to apply X and Y control voltages to the piezoelectric transducer.

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patent: 5026998 (1991-06-01), Holzl
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5059793 (1991-10-01), Miyamoto et al.
patent: 5144150 (1992-09-01), Yoshizumi et al.
"A Scanning Tunneling Microscope With A Capacitance-Based Position Monitor", by Griffith et al., Journal of Vacuum Science Technology, Nov./Dec., 1990, pp. 2023-2027.
"Optical Scan-Correction System Applied To Atomic Force Microscopy", by Barrett and Quate, Rev. Sci. Instrum. 62(6), Jun. 1991, American Institute of Physics, pp. 1393-1399.

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