Scanning probe microscope having scan correction

Details Scanning probe microscope having scan correction Scanning probe microscope having scan correction

1991-09-26

1993-05-11

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 318640, G01N 2300

Patent

active

052104109

ABSTRACT:
An atomic force microscope is described having a scan correction arrangement. Sensors detect the actual position of tubular scanners for a sample in an xy plane. This position information is then used for post-imaging correction or as a feedback signal. Detection and use of the actual position assures that errors caused by hysteresis, etc., are obviated. Various embodiments of an appropriate sensor are described.

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Barrett et al., "Optical Scan-Correction System Applied to Atomic Force Microscopy," Rev. Sci. Instrum. 62(6), Jun. 1991, pp. 1393-1399.
Griffith et al., "A Scanning Tunneling Microscope with a Capacitance-based Position Monitor," J. Vac. Sci. Technol. B 8(6), Nov./Dec. 10, 1990, pp. 2023-2027.
Marti et al., "Control Electronics for Atomic Force Microscopy", Rev. Sci. Instrum. 59(6), Jun. 1988, pp. 836-839.

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