Method of making source junction breakdown for devices with sour

Details Method of making source junction breakdown for devices with sour Method of making source junction breakdown for devices with sour

1991-05-15

1993-03-23

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 38, 437 45, H01L 21266

Patent

active

051963612

ABSTRACT:
A method for making a device and the device itself which utilizes selectively doping part of the channel directly adjacent to the source to improve source-channel junction breakdown voltage is disclosed. This is accomplished through reduced dopant incorporation in the channel directly adjacent to the source during the channel doping steps. The portion of the channel which receives less channel dopant should not be so great that the charging of the floating gate is significantly altered.

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