Magnetically driven vibrating beam force transducer

Measuring and testing – Dynamometers – Responsive to force

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73DIG1, G01L 110

Patent

active

049129902

ABSTRACT:
A vibrating beam force transducer that can be realized in a silicon micromachined device such as a micromachined accelerometer. The transducer includes a beam having a longitudinal axis, and a drive circuit electrically coupled to the beam for causing the beam to oscillate at a resonant frequency that is a function of a force applied along the longitudinal beam axis. The drive circuit provides an electrical current to the beam, and the beam, or a conductive portion thereof, conducts the current along a path that includes an axial component parallel to the longitudinal axis. A magnetic field is created intersecting the axial component, such that the electric current interacts with the magnetic field to produce a force that causes the beam to oscillate at the resonant frequency. In a preferred embodiment, the transducer has a double ended tuning fork configuration, and the current path extends along one beam and back along the other beam.

REFERENCES:
patent: 2854581 (1958-09-01), Scarrott
patent: 3190129 (1965-06-01), Kritz et al.
patent: 3529470 (1970-09-01), Agar
patent: 4215570 (1980-08-01), EerNisse
patent: 4372173 (1983-02-01), EerNisse et al.
patent: 4467651 (1984-08-01), Peters et al.

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