Apparatus to clean solid surfaces using a cryogenic aerosol

Details Apparatus to clean solid surfaces using a cryogenic aerosol Apparatus to clean solid surfaces using a cryogenic aerosol

1992-10-09

1993-05-11

Kisliuk, Bruce M.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

134 7, 51417, 51421, 51439, B24C 100

Patent

active

052090280

ABSTRACT:
The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.

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