Stock material or miscellaneous articles – Composite – Of silicon containing
Patent
1984-05-14
1986-10-14
Lusignan, Michael R.
Stock material or miscellaneous articles
Composite
Of silicon containing
427 531, 4271261, 427190, 428689, B05D 306, B05D 512, B32B 904, B32B 1900
Patent
active
046172378
ABSTRACT:
A method of producing a thin film comprising a conductive metal silicide and the products produced therefrom are disclosed. The method is much less complex than methods employed in the prior art for producing conductive thin films and the method reduces substrate damage by maintaining processing temperatures at about 1,000.degree. C. or less. The process employs a stable suspension comprising ultrafine powders in a solvent. This suspension is deposited on a surface of a substrate and is subsequently heated to form a thin conductive film. The thin conductive film comprises polycrystalline metal silicide, preferably a refractory metal silicide, and may also contain silicon. Composites comprising the thin conductive films and a substrate are also disclosed. The process and products are particularly suited for use in VLSI and VVLSI production.
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Gupta Arunava
West Gary A.
Yardley James T.
Allied Corporation
Fuchs Gerhard H,.
Hampilos Gus T.
Lusignan Michael R.
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