Spin-on glass dispensing monitor

Details Spin-on glass dispensing monitor Spin-on glass dispensing monitor

1998-07-07

2000-07-25

Wu, Daniel J.

Communications: electrical

Condition responsive indicating system

Specific condition

340679, 36452818, 222 55, 222 61, 222379, 702138, G08B 2100

Patent

active

060941421

ABSTRACT:
A dispensing monitor used in a SOG machine to planarize a semiconductor substrate which includes: a container, a gas control valve. a gas release valve, a pressure monitor, and a pressure sensing apparatus. A chemical solution contained in the container is controlled and conveyed through the gas control valve to be sprayed onto the substrate. The pressure monitor and the pressure sensing apparatus and the gas release valve are used for monitoring the internal pressure to keep a constant pressure so that the chemical solution is precisely exported.

REFERENCES:
patent: 4972180 (1990-11-01), Akai et al.
patent: 5808559 (1998-09-01), Buckler
patent: 5905656 (1999-05-01), Wang et al.

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